Dongguan Yanmeijia Optical Co.,Ltd

Core Services

SLE Micro Machining for Glass & Transparent Materials

YMJ provides advanced Selective Laser-Induced Etching (SLE) services for ultra-precision microfabrication in transparent materials such as glass.

SLE is a two-step process combining ultrashort pulse laser modification with chemical wet etching, enabling the creation of complex internal structures, microchannels, and high-aspect-ratio features that cannot be achieved by conventional machining.

This technology is ideal for applications requiring high precision, smooth internal surfaces, and crack-free structures.


How SLE Technology Works

Step 1: Laser Modification

Ultrashort pulse (femtosecond) laser is used to precisely modify selected regions inside transparent materials without affecting surrounding areas.

  • Internal modification without surface damage
  • High-speed processing suitable for volume production
  • Precise control of microstructures

Step 2: Selective Chemical Etching

The modified regions are selectively removed through chemical wet etching, while unmodified material remains intact.

  • High selectivity between modified and unmodified areas
  • Enables complex 3D microstructures
  • Smooth internal surfaces and high precision

Key Advantages

  • No micro-cracks or chipping
  • High aspect ratio up to 1:100
  • Straight sidewalls with zero taper
  • Smooth surface finish (Ra < 1 μm)
  • Capable of complex internal geometries
  • Suitable for ultra-thin to thick glass
  • High repeatability for industrial production

Technical Capabilities

ParameterCapability
Hole Diameter≥20 μm
Aspect RatioUp to 1:100
Surface RoughnessRa < 1 μm
Glass Thickness30 μm – 3 mm
Wafer SizeUp to 200 × 200 mm (8”)
GeometryCircular, square, complex 3D structures
MaterialsAll types of glass & transparent materials

Microstructure Capabilities

YMJ SLE technology enables fabrication of:

  • Microchannels
  • Microwells
  • Through Glass Vias (TGV)
  • Internal cavities
  • 3D microstructures
  • Fiber alignment arrays

Applications

Our SLE solutions are widely used in high-end precision industries:

  • Microfluidic devices
  • Biomedical components
  • Optical and photonics systems
  • MEMS devices
  • Semiconductor wafer processing (TGV)
  • Lab-on-chip applications

Why Choose YMJ

  • Advanced femtosecond laser + SLE integration capability
  • Strong expertise in glass micromachining
  • Ability to produce complex internal microstructures
  • Support for prototype to mass production
  • Flexible cooperation: OEM / ODM / custom design
  • Continuous equipment optimization with professional laser partners

FAQ

What is SLE (Selective Laser-Induced Etching)?
SLE is a microfabrication process combining ultrafast laser modification and chemical etching to create high-precision internal structures in transparent materials.


What makes SLE better than traditional glass machining?
SLE enables internal structures, high aspect ratios, and crack-free processing, which are difficult or impossible with mechanical or conventional laser methods.


What materials can be processed with SLE?
Primarily glass and other transparent materials, including optical glass and specialty substrates.


What applications is SLE best suited for?
Microfluidics, MEMS, biomedical devices, optical components, and semiconductor applications such as TGV.


Get a Quote

Looking for a reliable SLE micro machining supplier?

Send us your drawings or technical requirements today.
YMJ will provide a fast quotation and optimized solution for your microfabrication needs.

Contact us now to start your project

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